Coupled structural-electrostatic analysis of acoustic microsensor

Lim Hock Aun, Ahmad Kamal Ariffm, Mohd Ibsan, Mohd Jailani, Mohd. Jailani Mohd Nor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper focuses on the design of acoustic microsensor using fmite element analysis with multiphysics coupling. Piezoelectric materials (PZT 5A) are used as the cantilever beams for the acoustic microsensor. These cantilever beams have different lengths to sense sound signals at the range of 20 Hz to 20 Mfi. When the sound signals are applied to the acoustic microsensor, the beams will vibrate at their respective resonant frequencies to produce the electrical potentials. The electrostatic computations are coupled with the structural mechanical computation via a piezo-electrical relationship. Eigen frequency solver is used to find the natural frequencies of the cantilever beams.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages543-546
Number of pages4
Publication statusPublished - 2002
Event2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang
Duration: 19 Dec 200221 Dec 2002

Other

Other2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002
CityPenang
Period19/12/0221/12/02

Fingerprint

Microsensors
Cantilever beams
Electrostatics
Acoustics
Natural frequencies
Acoustic waves
Piezoelectric materials

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Aun, L. H., Ariffm, A. K., Ibsan, M., Jailani, M., & Mohd Nor, M. J. (2002). Coupled structural-electrostatic analysis of acoustic microsensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 543-546). [1217882]

Coupled structural-electrostatic analysis of acoustic microsensor. / Aun, Lim Hock; Ariffm, Ahmad Kamal; Ibsan, Mohd; Jailani, Mohd; Mohd Nor, Mohd. Jailani.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 543-546 1217882.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aun, LH, Ariffm, AK, Ibsan, M, Jailani, M & Mohd Nor, MJ 2002, Coupled structural-electrostatic analysis of acoustic microsensor. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 1217882, pp. 543-546, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.
Aun LH, Ariffm AK, Ibsan M, Jailani M, Mohd Nor MJ. Coupled structural-electrostatic analysis of acoustic microsensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 543-546. 1217882
Aun, Lim Hock ; Ariffm, Ahmad Kamal ; Ibsan, Mohd ; Jailani, Mohd ; Mohd Nor, Mohd. Jailani. / Coupled structural-electrostatic analysis of acoustic microsensor. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. pp. 543-546
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