Control growth of silicon nanocolumns' epitaxy on silicon nanowires

Su Kong Chong, Chang Fu Dee, Noorhana Yahya, Saadah Abdul Rahman

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

The epitaxial growth of Si nanocolumns on Si nanowires was studied using hot-wire chemical vapor deposition. A single-crystalline and surface oxide-free Si nanowire core (core radius ~21 ± 5 nm) induced by indium crystal seed was used as a substance for the vapor phase epitaxial growth. The growth process is initiated by sidewall facets, which then nucleate upon certain thickness to form Si islands and further grow to form nanocolumns. The Si nanocolumns with diameter of 10-20 nm and aspect ratio up to 10 can be epitaxially grown on the surface of nanowires. The results showed that the radial growth rate of the Si nanocolumns remains constant with the increase of deposition time. Meanwhile, the radial growth rates are controllable by manipulating the hydrogen to silane gas flow rate ratio. The optical antireflection properties of the Si nanocolumns' decorated SiNW arrays are discussed in the text.

Original languageEnglish
Article number1571
JournalJournal of Nanoparticle Research
Volume15
Issue number4
DOIs
Publication statusPublished - 2013

Fingerprint

Silicon Nanowires
Epitaxy
Nanowires
Silicon
Epitaxial growth
epitaxy
Epitaxial Growth
nanowires
silicon
Silanes
Indium
Vapor phase epitaxy
Chemical Vapor Deposition
Growth Process
Gas Flow
Facet
Aspect Ratio
Flow Rate
Oxides
Hydrogen

Keywords

  • Epitaxy
  • Hot-wire chemical vapor deposition
  • Nanowires
  • Silicon nanocolumns

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Modelling and Simulation
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering

Cite this

Control growth of silicon nanocolumns' epitaxy on silicon nanowires. / Chong, Su Kong; Dee, Chang Fu; Yahya, Noorhana; Rahman, Saadah Abdul.

In: Journal of Nanoparticle Research, Vol. 15, No. 4, 1571, 2013.

Research output: Contribution to journalArticle

Chong, Su Kong ; Dee, Chang Fu ; Yahya, Noorhana ; Rahman, Saadah Abdul. / Control growth of silicon nanocolumns' epitaxy on silicon nanowires. In: Journal of Nanoparticle Research. 2013 ; Vol. 15, No. 4.
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