Condenser microphone performance simulation using equivalent circuit method

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

This paper presents the analysis of a condenser microphone for use in a hearing instrument and proposes a structure that can be realized using MicroElectroMechanical systems (MEMS) technology. The microphone uses a thin low stress polysilicon with an air gap and a silicon nitride perforated back plate. The aim is to develop the microphones with high sensitivity and low fabrication coast The equivalent circuit method has been used to evaluate the performance of the microphone. The microphone diaphragm has a proposed thickness of 0.8 μm, an area of 2.6 mm2, an air gap of 3.0 μm and a 1.0 μm thick back plate with acoustical ports. A 12.0 volt DC bias voltage is provided between the diaphragm and the back plate. A sensitivity of more than 45.0 mV/Pa is expected for the microphone, with a high frequency response extending to 20 kHz.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages22-29
Number of pages8
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Microphones
Equivalent circuits
Diaphragms
Audition
Bias voltage
Air
Silicon nitride
Polysilicon
Frequency response
MEMS
Coastal zones
Fabrication

Keywords

  • Circuit method
  • Condenser microphone
  • Frequency response
  • MEMS
  • Sensitivity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ganji, B. A., & Yeop Majlis, B. (2004). Condenser microphone performance simulation using equivalent circuit method. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 22-29). [1620830]

Condenser microphone performance simulation using equivalent circuit method. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 22-29 1620830.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ganji, BA & Yeop Majlis, B 2004, Condenser microphone performance simulation using equivalent circuit method. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620830, pp. 22-29, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Ganji BA, Yeop Majlis B. Condenser microphone performance simulation using equivalent circuit method. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 22-29. 1620830
Ganji, Bahram Azizollah ; Yeop Majlis, Burhanuddin. / Condenser microphone performance simulation using equivalent circuit method. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 22-29
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