Composition and optical property controlled in In2O3/W2N nanostructure composites by nitrogen plasma assisted in-situ thermal annealing

Azianty Saroni, Mahdi Alizadeh, Saadah Abdul Rahman, Chang Fu Dee, Boon Tong Goh

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In2O3/W2N nanostructure composites were grown by nitrogen plasma assisted in-situ thermal annealing at different hot-filament temperatures, Tf. The in-situ thermal annealing changes the as-grown In2O3 nanostructure to In2O3/W2N nanostructure composite with decreasing the grain size from 200 to 300 nm to ~ 100 nm. The optical spectroscopy results indicate that the optical energy gap of the nanostructure composites (3.7–2.7 eV) can be effectively tailored by monotonically increasing the W2N incorporation. The formation of W2N is attributed to the high energetic ion bombardment of N adatoms and incorporation of W adatoms. Furthermore, the effects of the filament temperature, Tf on the compositions in relation with the optical properties of the nanostructure composite are discussed.

Original languageEnglish
Pages (from-to)6-14
Number of pages9
JournalMaterials Science in Semiconductor Processing
Volume68
DOIs
Publication statusPublished - 1 Sep 2017

Fingerprint

Nitrogen plasma
nitrogen plasma
Nanostructures
Optical properties
Annealing
optical properties
annealing
composite materials
Composite materials
Chemical analysis
Adatoms
adatoms
filaments
bombardment
Ion bombardment
grain size
Energy gap
temperature
Hot Temperature
Temperature

Keywords

  • Evaporation
  • Nanostructure composite
  • Nitrogen ion bombardment
  • Optical energy gap
  • WN

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Composition and optical property controlled in In2O3/W2N nanostructure composites by nitrogen plasma assisted in-situ thermal annealing. / Saroni, Azianty; Alizadeh, Mahdi; Rahman, Saadah Abdul; Dee, Chang Fu; Goh, Boon Tong.

In: Materials Science in Semiconductor Processing, Vol. 68, 01.09.2017, p. 6-14.

Research output: Contribution to journalArticle

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AU - Alizadeh, Mahdi

AU - Rahman, Saadah Abdul

AU - Dee, Chang Fu

AU - Goh, Boon Tong

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AB - In2O3/W2N nanostructure composites were grown by nitrogen plasma assisted in-situ thermal annealing at different hot-filament temperatures, Tf. The in-situ thermal annealing changes the as-grown In2O3 nanostructure to In2O3/W2N nanostructure composite with decreasing the grain size from 200 to 300 nm to ~ 100 nm. The optical spectroscopy results indicate that the optical energy gap of the nanostructure composites (3.7–2.7 eV) can be effectively tailored by monotonically increasing the W2N incorporation. The formation of W2N is attributed to the high energetic ion bombardment of N adatoms and incorporation of W adatoms. Furthermore, the effects of the filament temperature, Tf on the compositions in relation with the optical properties of the nanostructure composite are discussed.

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