Compact electrodynamics MEMS-speaker

Burhanuddin Yeop Majlis, Gandi Sugandi, Mimiwaty Mohd Noor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper describes the design, fabrication and characterization of an electrodynamic MEMS speaker. The miniaturized speaker consists of a deposited single turn microcoil on a 25 μm thick suspended polyimide diaphragm with a 2.5 mm diameter and a small volume permanent magnet Neodymium-Iron-Boron (Nd-Fe-B). A significant improvement of frequency response to sound pressure level of MEMS-speaker in sealed condition was achieved. The sealed measurement performed in a 1500 mm3 silicon rubber tube resulted in a peak amplitude of 90 dB-SPL at a frequency range of 1, 5 and 10 kHz and experienced magnitude boosting with a value of 25 to 30 dB at frequency below 1 kHz compared to unsealed condition. Peak magnitude level of 92.5 dB-SPL and 110 dB-SPL were achieved at the frequency of 200-500 Hz and 20-60 Hz respectively. The results shows that the fabricated MEMS speaker can be applied in ear canal applications such as hearing AIDS and music player earphones.

Original languageEnglish
Title of host publicationChina Semiconductor Technology International Conference 2017, CSTIC 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781509066940
DOIs
Publication statusPublished - 4 May 2017
Event2017 China Semiconductor Technology International Conference, CSTIC 2017 - Shanghai, China
Duration: 12 Mar 201713 Mar 2017

Other

Other2017 China Semiconductor Technology International Conference, CSTIC 2017
CountryChina
CityShanghai
Period12/3/1713/3/17

Fingerprint

Electrodynamics
MEMS
Earphones
Neodymium
Boron
Rubber
Audition
Canals
Silicon
Diaphragms
Polyimides
Permanent magnets
Frequency response
Iron
Acoustic waves
Fabrication

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Yeop Majlis, B., Sugandi, G., & Noor, M. M. (2017). Compact electrodynamics MEMS-speaker. In China Semiconductor Technology International Conference 2017, CSTIC 2017 [7919752] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CSTIC.2017.7919752

Compact electrodynamics MEMS-speaker. / Yeop Majlis, Burhanuddin; Sugandi, Gandi; Noor, Mimiwaty Mohd.

China Semiconductor Technology International Conference 2017, CSTIC 2017. Institute of Electrical and Electronics Engineers Inc., 2017. 7919752.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yeop Majlis, B, Sugandi, G & Noor, MM 2017, Compact electrodynamics MEMS-speaker. in China Semiconductor Technology International Conference 2017, CSTIC 2017., 7919752, Institute of Electrical and Electronics Engineers Inc., 2017 China Semiconductor Technology International Conference, CSTIC 2017, Shanghai, China, 12/3/17. https://doi.org/10.1109/CSTIC.2017.7919752
Yeop Majlis B, Sugandi G, Noor MM. Compact electrodynamics MEMS-speaker. In China Semiconductor Technology International Conference 2017, CSTIC 2017. Institute of Electrical and Electronics Engineers Inc. 2017. 7919752 https://doi.org/10.1109/CSTIC.2017.7919752
Yeop Majlis, Burhanuddin ; Sugandi, Gandi ; Noor, Mimiwaty Mohd. / Compact electrodynamics MEMS-speaker. China Semiconductor Technology International Conference 2017, CSTIC 2017. Institute of Electrical and Electronics Engineers Inc., 2017.
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