Cleanroom contamination monitoring using FTIR

Mohd Juhari Bin Mat Basri, Yuen Yee Wong, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fourier transformed infrared spectroscopy (FTIR) was used to obtain spectrum of some consumable products used in the Institute of Microengineering and Nanoelectronics (IMEN) cleanroom at UKM. These spectra are used as reference FTIR databases. Random samples were extracted from that consumable products and tested using FTIR to get sample spectra. These sample spectra were then used as "fingerprints" to determine the identity of contaminants by matching the IR absorption spectrum with reference databases. All reference gave reproducible characteristic infrared absorption spectra. The samples showed close similarity of spectrum corresponding to the source of extraction. While using glass disk as a device and a randomly chosen sample as contaminant, we could successfully determine the source of contaminant by deducting the glass disk spectrum and comparing it with databases. In this experiment, each of materials produces a fingerprint that can be used to identify potential sources of contamination.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages340-344
Number of pages5
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Infrared spectroscopy
Contamination
Impurities
Monitoring
Absorption spectra
Glass
Nanoelectronics
Infrared absorption
Experiments

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Basri, M. J. B. M., Wong, Y. Y., & Yeop Majlis, B. (2004). Cleanroom contamination monitoring using FTIR. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 340-344). [1620901]

Cleanroom contamination monitoring using FTIR. / Basri, Mohd Juhari Bin Mat; Wong, Yuen Yee; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 340-344 1620901.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Basri, MJBM, Wong, YY & Yeop Majlis, B 2004, Cleanroom contamination monitoring using FTIR. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620901, pp. 340-344, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Basri MJBM, Wong YY, Yeop Majlis B. Cleanroom contamination monitoring using FTIR. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 340-344. 1620901
Basri, Mohd Juhari Bin Mat ; Wong, Yuen Yee ; Yeop Majlis, Burhanuddin. / Cleanroom contamination monitoring using FTIR. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 340-344
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