Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas

Siti Aisyah Abd Aziz, Noorain Purhanudin, Rozidawati Awang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency plasma enhance chemical vapor deposition (RF-PECVD) using a fixed mixture of acetylene (C2H2) at 20 sccm and nitrogen (N2) gases at 50 sccm. The films were deposited at different RF power of 60, 70, 80, 90 and 100 W. The deposition pressure, deposition time and substrate temperature were kept constant at 0.8 mbar, 30 minutes and 100°C, respectively. The chemical bonding of the a-CNx thin films was characterized using Fourier transform infrared spectroscopy (FTIR) and its sensing properties was determined using a home built humidity sensor system. The increase of RF powers leads to an increment of formation of double (C=N) and triple (C≡N) bonds as compared to a-CNx deposited using methane (CH4) or ethane (C2H6) gas. This is due to a higher ratio of C to H atoms in C2H2. The humidity sensing performance show the sensitivity of the films is the highest at low deposition power in changes of relative humidity (%RH). The a-CNx thin film show good repeatability and high sensitivity as a humidity sensing materials which prepared at low RF power.

Original languageEnglish
Title of host publication1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016
PublisherAmerican Institute of Physics Inc.
Volume1838
ISBN (Electronic)9780735415089
DOIs
Publication statusPublished - 5 May 2017
Event1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016 - Selangor, Malaysia
Duration: 28 Nov 201630 Nov 2016

Other

Other1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016
CountryMalaysia
CitySelangor
Period28/11/1630/11/16

Fingerprint

carbon nitrides
acetylene
humidity
gases
thin films
sensitivity
ethane
radio frequencies
methane
infrared spectroscopy
vapor deposition
nitrogen
sensors
atoms
temperature

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Aziz, S. A. A., Purhanudin, N., & Awang, R. (2017). Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas. In 1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016 (Vol. 1838). [020010] American Institute of Physics Inc.. https://doi.org/10.1063/1.4982182

Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas. / Aziz, Siti Aisyah Abd; Purhanudin, Noorain; Awang, Rozidawati.

1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016. Vol. 1838 American Institute of Physics Inc., 2017. 020010.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aziz, SAA, Purhanudin, N & Awang, R 2017, Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas. in 1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016. vol. 1838, 020010, American Institute of Physics Inc., 1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016, Selangor, Malaysia, 28/11/16. https://doi.org/10.1063/1.4982182
Aziz SAA, Purhanudin N, Awang R. Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas. In 1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016. Vol. 1838. American Institute of Physics Inc. 2017. 020010 https://doi.org/10.1063/1.4982182
Aziz, Siti Aisyah Abd ; Purhanudin, Noorain ; Awang, Rozidawati. / Chemical bonding and humidity sensing properties of amorphous carbon nitride (a-CNx) by acetylene gas. 1st UKM-ISESCO-COMSATS International Workshop on Nanotechnology for Young Scientists, IWYS 2016. Vol. 1838 American Institute of Physics Inc., 2017.
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abstract = "Amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency plasma enhance chemical vapor deposition (RF-PECVD) using a fixed mixture of acetylene (C2H2) at 20 sccm and nitrogen (N2) gases at 50 sccm. The films were deposited at different RF power of 60, 70, 80, 90 and 100 W. The deposition pressure, deposition time and substrate temperature were kept constant at 0.8 mbar, 30 minutes and 100°C, respectively. The chemical bonding of the a-CNx thin films was characterized using Fourier transform infrared spectroscopy (FTIR) and its sensing properties was determined using a home built humidity sensor system. The increase of RF powers leads to an increment of formation of double (C=N) and triple (C≡N) bonds as compared to a-CNx deposited using methane (CH4) or ethane (C2H6) gas. This is due to a higher ratio of C to H atoms in C2H2. The humidity sensing performance show the sensitivity of the films is the highest at low deposition power in changes of relative humidity ({\%}RH). The a-CNx thin film show good repeatability and high sensitivity as a humidity sensing materials which prepared at low RF power.",
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AB - Amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency plasma enhance chemical vapor deposition (RF-PECVD) using a fixed mixture of acetylene (C2H2) at 20 sccm and nitrogen (N2) gases at 50 sccm. The films were deposited at different RF power of 60, 70, 80, 90 and 100 W. The deposition pressure, deposition time and substrate temperature were kept constant at 0.8 mbar, 30 minutes and 100°C, respectively. The chemical bonding of the a-CNx thin films was characterized using Fourier transform infrared spectroscopy (FTIR) and its sensing properties was determined using a home built humidity sensor system. The increase of RF powers leads to an increment of formation of double (C=N) and triple (C≡N) bonds as compared to a-CNx deposited using methane (CH4) or ethane (C2H6) gas. This is due to a higher ratio of C to H atoms in C2H2. The humidity sensing performance show the sensitivity of the films is the highest at low deposition power in changes of relative humidity (%RH). The a-CNx thin film show good repeatability and high sensitivity as a humidity sensing materials which prepared at low RF power.

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