Characterization of random reactive ion etched-textured silicon solar cells

Saleem H. Zaidi, D. S. Ruby, J. M. Gee

Research output: Contribution to journalArticle

127 Citations (Scopus)

Abstract

Hemispherical reflectance and internal quantum efficiency (IQE) measurements have been employed to evaluate the response of Si nanostructured surfaces formed by using reactive ion etching (RIE) random texturing techniques. Random RIE-textured surfaces typically exhibit broadband anti-reflection behavior with solar-weighted-reflectance (SWR) of ≈3% over 300-1200-nm spectral range. RIE-texturing has been demonstrated over large areas (∼180 cm2) of both single and muiticrystalline Si substrates. Due to the surface contamination and plasma-induced damage, as formed RIE-textured solar cells do not provide enhanced short-circuit current. However, improved surface cleaning combined with controlled wet-chemical damage removal etches provide a significant improvement in the short-circuit current. For such textures, the internal quantum efficiencies are comparable to the random, wet-chemically-textured solar cells. In both the UV and near-IR wavelength regions, the RIE-textured subwavelength surfaces exhibit superior performance in comparison with the wet-chemically-textured surfaces. Due to their large area, low-reflection capability, random, RIE-texturing techniques are expected to find widespread commercial applicability in low-cost, large-area multicrystalline Si solar cells.

Original languageEnglish
Pages (from-to)1200-1206
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume48
Issue number6
DOIs
Publication statusPublished - Jun 2001
Externally publishedYes

Fingerprint

Silicon solar cells
Reactive ion etching
solar cells
etching
Ions
Texturing
Solar cells
ions
short circuit currents
Quantum efficiency
Short circuit currents
quantum efficiency
damage
reflectance
Surface cleaning
cleaning
contamination
Contamination
textures
Textures

Keywords

  • Antireflection surfaces
  • Random RIE texturing
  • Si solar cells

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Characterization of random reactive ion etched-textured silicon solar cells. / Zaidi, Saleem H.; Ruby, D. S.; Gee, J. M.

In: IEEE Transactions on Electron Devices, Vol. 48, No. 6, 06.2001, p. 1200-1206.

Research output: Contribution to journalArticle

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