Pencirian pertumbuhan lapisan nano grafin di atas elektrod antara digit superkapasitor MEMS

Translated title of the contribution: Characterization of graphene nanolayers Grown on MEMS interdigital supercapacitor electrode

Hafzaliza Erny Zainal Abidin, Azrul Azlan Hamzah, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

MEMS supercapacitor, specifically with interdigital (IDE) electrodes design, has recently gained much interest in fields such as bioMEMS, biomedical implants, power electronic devices and high power applications due to its high charging capacity. This research presents a MEMS supercapacitor with graphene nanolayers grown on its electrodes. The MEMS supercapacitor consists of silicon dioxide (SiO2), nickel, graphene, polypyrrole (Ppy) and polyvinyl alcohol (PVA) layers. This paper more focus on the fabrication of graphene nanolayer structures on MEMS supercapacitor electrodes via several subsequent plasma-enhanced chemical vapor deposition (PECVD), E-beam evaporation and spin coating processes. PECVD graphene was grown for 10 min at 40 Watt at temperatures between 400°C and 1000°C. Raman spectrum indicates peaks at 1340 and 1580 cm-1 corresponding to D and G band, respectively. The 2D peaks appear in range of 2600 to 3000 cm-1. The intensity ratio of 2D and G peaks at 1000°C is 0.43, which indicates a good quality of multilayer graphene.

Original languageMalay
Pages (from-to)1061-1067
Number of pages7
JournalSains Malaysiana
Volume46
Issue number7
DOIs
Publication statusPublished - 1 Jul 2017

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Graphite
MEMS
Electrodes
Plasma enhanced chemical vapor deposition
Polyvinyl Alcohol
Spin coating
Nickel
Power electronics
Silicon Dioxide
Raman scattering
Multilayers
Evaporation
Supercapacitor
Fabrication
Temperature

ASJC Scopus subject areas

  • General

Cite this

Pencirian pertumbuhan lapisan nano grafin di atas elektrod antara digit superkapasitor MEMS. / Abidin, Hafzaliza Erny Zainal; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

In: Sains Malaysiana, Vol. 46, No. 7, 01.07.2017, p. 1061-1067.

Research output: Contribution to journalArticle

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