Characterization of graphene based capacitive microphone

Research output: Contribution to journalArticle

Abstract

This research focuses on the design, fabrication and characterization of the graphene based capacitive microphone. Finite element analysis (FEA) is first simulated in order to design and study the proposed graphene based capacitive microphone. While the fabrication introduced MEMS technique in order to reduce the physical size, volume and cost without neglecting the performance. This study discusses on physical characteristics of graphene diaphragm for capacitive microphone. The fabrication of 200 nm air gap and the free-standing suspended graphene with the contribution of the van der Waals force between the graphene layer as a diaphragm and the substrate are presented in this study. The first stage involved in this study was the photolithography process of patterning electrodes with 4 different dimensions of diaphragm. The characterization was performed by using surface profilometer, optical microscopy, Raman spectroscopy and FESEM to evaluate the physical characteristics of the diaphragm. In the last stage, LCR meter was used to measure the capacitive change with different diameter of graphene diaphragm within frequency range of 20 Hz to 20 kHz. FEA analysis showed the good sensitivity against the frequency response for the largest proposed diameter of diaphragm.

Original languageEnglish
Pages (from-to)1201-1207
Number of pages7
JournalSains Malaysiana
Volume48
Issue number6
DOIs
Publication statusPublished - 1 Jan 2019

Fingerprint

Microphones
Diaphragms
Graphene
Fabrication
Finite element method
Van der Waals forces
Photolithography
Frequency response
MEMS
Optical microscopy
Raman spectroscopy
Electrodes
Substrates
Air
Costs

Keywords

  • Capacitive microphone
  • Frequency range
  • Graphene diaphragm
  • MEMS

ASJC Scopus subject areas

  • General

Cite this

Characterization of graphene based capacitive microphone. / Mustapha, Haslinawati Mohd; Mohd Razip Wee, Mohd Farhanulhakim; Ahmad Rifqi, Md Zain; Mohamed, Mohd Ambri.

In: Sains Malaysiana, Vol. 48, No. 6, 01.01.2019, p. 1201-1207.

Research output: Contribution to journalArticle

@article{b360ad2d10a44b2faaec6df1133660da,
title = "Characterization of graphene based capacitive microphone",
abstract = "This research focuses on the design, fabrication and characterization of the graphene based capacitive microphone. Finite element analysis (FEA) is first simulated in order to design and study the proposed graphene based capacitive microphone. While the fabrication introduced MEMS technique in order to reduce the physical size, volume and cost without neglecting the performance. This study discusses on physical characteristics of graphene diaphragm for capacitive microphone. The fabrication of 200 nm air gap and the free-standing suspended graphene with the contribution of the van der Waals force between the graphene layer as a diaphragm and the substrate are presented in this study. The first stage involved in this study was the photolithography process of patterning electrodes with 4 different dimensions of diaphragm. The characterization was performed by using surface profilometer, optical microscopy, Raman spectroscopy and FESEM to evaluate the physical characteristics of the diaphragm. In the last stage, LCR meter was used to measure the capacitive change with different diameter of graphene diaphragm within frequency range of 20 Hz to 20 kHz. FEA analysis showed the good sensitivity against the frequency response for the largest proposed diameter of diaphragm.",
keywords = "Capacitive microphone, Frequency range, Graphene diaphragm, MEMS",
author = "Mustapha, {Haslinawati Mohd} and {Mohd Razip Wee}, {Mohd Farhanulhakim} and {Ahmad Rifqi}, {Md Zain} and Mohamed, {Mohd Ambri}",
year = "2019",
month = "1",
day = "1",
doi = "10.17576/jsm-2019-4806-07",
language = "English",
volume = "48",
pages = "1201--1207",
journal = "Sains Malaysiana",
issn = "0126-6039",
publisher = "Penerbit Universiti Kebangsaan Malaysia",
number = "6",

}

TY - JOUR

T1 - Characterization of graphene based capacitive microphone

AU - Mustapha, Haslinawati Mohd

AU - Mohd Razip Wee, Mohd Farhanulhakim

AU - Ahmad Rifqi, Md Zain

AU - Mohamed, Mohd Ambri

PY - 2019/1/1

Y1 - 2019/1/1

N2 - This research focuses on the design, fabrication and characterization of the graphene based capacitive microphone. Finite element analysis (FEA) is first simulated in order to design and study the proposed graphene based capacitive microphone. While the fabrication introduced MEMS technique in order to reduce the physical size, volume and cost without neglecting the performance. This study discusses on physical characteristics of graphene diaphragm for capacitive microphone. The fabrication of 200 nm air gap and the free-standing suspended graphene with the contribution of the van der Waals force between the graphene layer as a diaphragm and the substrate are presented in this study. The first stage involved in this study was the photolithography process of patterning electrodes with 4 different dimensions of diaphragm. The characterization was performed by using surface profilometer, optical microscopy, Raman spectroscopy and FESEM to evaluate the physical characteristics of the diaphragm. In the last stage, LCR meter was used to measure the capacitive change with different diameter of graphene diaphragm within frequency range of 20 Hz to 20 kHz. FEA analysis showed the good sensitivity against the frequency response for the largest proposed diameter of diaphragm.

AB - This research focuses on the design, fabrication and characterization of the graphene based capacitive microphone. Finite element analysis (FEA) is first simulated in order to design and study the proposed graphene based capacitive microphone. While the fabrication introduced MEMS technique in order to reduce the physical size, volume and cost without neglecting the performance. This study discusses on physical characteristics of graphene diaphragm for capacitive microphone. The fabrication of 200 nm air gap and the free-standing suspended graphene with the contribution of the van der Waals force between the graphene layer as a diaphragm and the substrate are presented in this study. The first stage involved in this study was the photolithography process of patterning electrodes with 4 different dimensions of diaphragm. The characterization was performed by using surface profilometer, optical microscopy, Raman spectroscopy and FESEM to evaluate the physical characteristics of the diaphragm. In the last stage, LCR meter was used to measure the capacitive change with different diameter of graphene diaphragm within frequency range of 20 Hz to 20 kHz. FEA analysis showed the good sensitivity against the frequency response for the largest proposed diameter of diaphragm.

KW - Capacitive microphone

KW - Frequency range

KW - Graphene diaphragm

KW - MEMS

UR - http://www.scopus.com/inward/record.url?scp=85069615685&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85069615685&partnerID=8YFLogxK

U2 - 10.17576/jsm-2019-4806-07

DO - 10.17576/jsm-2019-4806-07

M3 - Article

VL - 48

SP - 1201

EP - 1207

JO - Sains Malaysiana

JF - Sains Malaysiana

SN - 0126-6039

IS - 6

ER -