Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications

Research output: Contribution to journalArticle

Abstract

Purpose: The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach: Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition. Findings: The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material. Originality/value: Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.

Original languageEnglish
JournalMicroelectronics International
DOIs
Publication statusAccepted/In press - 1 Jan 2019

Fingerprint

electromechanical devices
Electromechanical devices
Silicon
Microphones
microphones
Silicon carbide
silicon carbides
microelectromechanical systems
MEMS
ultrasonics
Ultrasonics
membranes
Membranes
silicon
sensitivity
condensers
frequency ranges
Acoustics
silicon carbide
solid mechanics

Keywords

  • Audible frequency
  • Condenser microphone
  • Corrugated membrane
  • MEMS
  • Ultrasonic

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

@article{4778282f2b884cbd9986d2fa3dd4e79b,
title = "Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications",
abstract = "Purpose: The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach: Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition. Findings: The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material. Originality/value: Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.",
keywords = "Audible frequency, Condenser microphone, Corrugated membrane, MEMS, Ultrasonic",
author = "Auliya, {Rahmat Zaki} and Buyong, {Muhamad Ramdzan} and {Yeop Majlis}, Burhanuddin and {Mohd Razip Wee}, {Mohd Farhanulhakim} and Ooi, {Poh Choon}",
year = "2019",
month = "1",
day = "1",
doi = "10.1108/MI-02-2019-0010",
language = "English",
journal = "Microelectronics International",
issn = "1356-5362",
publisher = "Emerald Group Publishing Ltd.",

}

TY - JOUR

T1 - Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications

AU - Auliya, Rahmat Zaki

AU - Buyong, Muhamad Ramdzan

AU - Yeop Majlis, Burhanuddin

AU - Mohd Razip Wee, Mohd Farhanulhakim

AU - Ooi, Poh Choon

PY - 2019/1/1

Y1 - 2019/1/1

N2 - Purpose: The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach: Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition. Findings: The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material. Originality/value: Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.

AB - Purpose: The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane. Design/methodology/approach: Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition. Findings: The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material. Originality/value: Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.

KW - Audible frequency

KW - Condenser microphone

KW - Corrugated membrane

KW - MEMS

KW - Ultrasonic

UR - http://www.scopus.com/inward/record.url?scp=85071639746&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071639746&partnerID=8YFLogxK

U2 - 10.1108/MI-02-2019-0010

DO - 10.1108/MI-02-2019-0010

M3 - Article

JO - Microelectronics International

JF - Microelectronics International

SN - 1356-5362

ER -