Characterization of a-CNx thin films prepared by RF-PECVD technique for humidity sensor

Rozidawati Awang, N. F.H. Aziz, N. Purhanudin, Zalita Zainuddin

Research output: Contribution to journalArticle

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Abstract

In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency (RF) plasma enhanced chemical vapor deposition (RF-PECVD) technique. The RF power and gas mixture of methane (CH4) and nitrogen (N2) flow was kept constant, while the electrode distance was varied from 1 to 6 cm. The effect of electrode distance on the chemical bonding, morphology and humidity sensing responses of the films were investigated. Fourier transform infrared spectroscopy (FTIR) studies showed a systematic change in the spectra and showed three main peaks namely the G and D-peak, C≡N triple bonds and C-H/O-H groups. Uniform and porous morphology was observed for films deposited at smallest distance followed by non-porous cubicle-like grain as electrode distance increased. Subsequently formation of vertically aligned nanostructures apparent both from its surface and cross section images by increasing of electrode distance to the fullest. The humidity sensing property has been studied by recording their resistance response to relative humidity (RH) at room temperature. It was found that the resistance value decreases from 15.4 to 3.6 kΩ with the increase in RH from 9 to 85%, with the highest sensitivity of 77% for film deposited at smallest distance of 1 cm.

Original languageEnglish
Pages (from-to)509-514
Number of pages6
JournalSains Malaysiana
Volume46
Issue number3
DOIs
Publication statusPublished - 1 Mar 2017

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Humidity sensors
Plasma enhanced chemical vapor deposition
Atmospheric humidity
Thin films
Electrodes
Amorphous carbon
Methane
Gas mixtures
Nanostructures
Nitrogen
Temperature

Keywords

  • Electrode distance
  • Nitrile bands
  • Resistance

ASJC Scopus subject areas

  • General

Cite this

Characterization of a-CNx thin films prepared by RF-PECVD technique for humidity sensor. / Awang, Rozidawati; Aziz, N. F.H.; Purhanudin, N.; Zainuddin, Zalita.

In: Sains Malaysiana, Vol. 46, No. 3, 01.03.2017, p. 509-514.

Research output: Contribution to journalArticle

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