Characterization and analysis of heteroepitaxial growth on silicon structures

Ganesh Vanamu, Abhaya K. Datye, Andy Allerman, Saleem H. Zaidi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)372-373
Number of pages2
JournalMicroscopy and Microanalysis
Volume9
Issue numberSUPPL. 2
Publication statusPublished - 2003
Externally publishedYes

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Epitaxial growth
Silicon
silicon

ASJC Scopus subject areas

  • Instrumentation

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Characterization and analysis of heteroepitaxial growth on silicon structures. / Vanamu, Ganesh; Datye, Abhaya K.; Allerman, Andy; Zaidi, Saleem H.

In: Microscopy and Microanalysis, Vol. 9, No. SUPPL. 2, 2003, p. 372-373.

Research output: Contribution to journalArticle

Vanamu, G, Datye, AK, Allerman, A & Zaidi, SH 2003, 'Characterization and analysis of heteroepitaxial growth on silicon structures', Microscopy and Microanalysis, vol. 9, no. SUPPL. 2, pp. 372-373.
Vanamu, Ganesh ; Datye, Abhaya K. ; Allerman, Andy ; Zaidi, Saleem H. / Characterization and analysis of heteroepitaxial growth on silicon structures. In: Microscopy and Microanalysis. 2003 ; Vol. 9, No. SUPPL. 2. pp. 372-373.
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