Biocompatible "click" wafer bonding for microfluidic devices

Farizah Saharil, Carl Fredrik Carlborg, Tommy Haraldsson, Wouter Van Der Wijngaart

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

We introduce a novel dry wafer bonding concept designed for permanent attachment of micromolded polymer structures to surface functionalized silicon substrates. The method, designed for simultaneous fabrication of many lab-on-chip devices, utilizes a chemically reactive polymer microfluidic structure, which rapidly bonds to a functionalized substrate via "click" chemistry reactions. The microfluidic structure consists of an off-stoichiometry thiol-ene (OSTE) polymer with a very high density of surface bound thiol groups and the substrate is a silicon wafer that has been functionalized with common bio-linker molecules. We demonstrate here void free, and low temperature (< 37 °C) bonding of a batch of OSTE microfluidic layers to a silane functionalized silicon wafer.

Original languageEnglish
Pages (from-to)3032-3035
Number of pages4
JournalLab on a Chip - Miniaturisation for Chemistry and Biology
Volume12
Issue number17
DOIs
Publication statusPublished - 7 Sep 2012
Externally publishedYes

Fingerprint

Lab-On-A-Chip Devices
Wafer bonding
Microfluidics
Silicon
Sulfhydryl Compounds
Polymers
Silicon wafers
Stoichiometry
Substrates
Click Chemistry
Silanes
Functional polymers
Fabrication
Equipment and Supplies
Molecules
Temperature

ASJC Scopus subject areas

  • Biochemistry
  • Chemistry(all)
  • Bioengineering
  • Biomedical Engineering

Cite this

Saharil, F., Carlborg, C. F., Haraldsson, T., & Van Der Wijngaart, W. (2012). Biocompatible "click" wafer bonding for microfluidic devices. Lab on a Chip - Miniaturisation for Chemistry and Biology, 12(17), 3032-3035. https://doi.org/10.1039/c2lc21098c

Biocompatible "click" wafer bonding for microfluidic devices. / Saharil, Farizah; Carlborg, Carl Fredrik; Haraldsson, Tommy; Van Der Wijngaart, Wouter.

In: Lab on a Chip - Miniaturisation for Chemistry and Biology, Vol. 12, No. 17, 07.09.2012, p. 3032-3035.

Research output: Contribution to journalArticle

Saharil, F, Carlborg, CF, Haraldsson, T & Van Der Wijngaart, W 2012, 'Biocompatible "click" wafer bonding for microfluidic devices', Lab on a Chip - Miniaturisation for Chemistry and Biology, vol. 12, no. 17, pp. 3032-3035. https://doi.org/10.1039/c2lc21098c
Saharil, Farizah ; Carlborg, Carl Fredrik ; Haraldsson, Tommy ; Van Der Wijngaart, Wouter. / Biocompatible "click" wafer bonding for microfluidic devices. In: Lab on a Chip - Miniaturisation for Chemistry and Biology. 2012 ; Vol. 12, No. 17. pp. 3032-3035.
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