Bimaterial electromechanical systems for a biomimetical acoustic sensor

Enrico Mastropaolo, Latif Rhonira, Thomas Koickal, Alister Hamilton, Rebecca Cheung, Michael Newton, Leslie Smith

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Bimaterial planarized micromechanical beams have been designed, simulated, and fabricated with lengths in the range 800-5800 μm and distance to substrate 0.8-4.0 μm. The beams are to be used as vertical-mode resonant gates on p-type field-effect transistors for implementing an adaptable MEMS acoustic sensor inspired by the human ear. A process for fabricating planar bilayer double-clamped beams made of silicon nitride (SiN) and aluminum (Al(1Si)) has been developed. The planar design and bimaterial approach allow the fabrication of relatively straight beams with length up to 5800 μm with the possibility of controlling the degree of static deflection of the beams. The fabricated beams have shown a maximum deflection of ∼300 nm and a transverse concave shape with respect to the substrate due to the bilayer nature of the structure. From wafer curvature measurements, the stress in the SiN and Al(1Si) is 200 and 280 MPa, respectively. Finite element simulations and analysis of the profile of the beams have demonstrated that the films' stress magnitude influences the longitudinal and transverse profile of the beams. The fabricated devices resonate mechanically in the range 15-160 kHz. Preliminary electrical characterization of the devices has shown drain currents in the μA range for gate voltages of -20 to -25 V and drain voltages of -5 V.

Original languageEnglish
Article number06FD01
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume30
Issue number6
DOIs
Publication statusPublished - Nov 2012
Externally publishedYes

Fingerprint

Silicon nitride
Acoustics
acoustics
Drain current
sensors
Sensors
Electric potential
Substrates
Field effect transistors
Aluminum
MEMS
Fabrication
silicon nitrides
deflection
silicon nitride
ear
electric potential
profiles
microelectromechanical systems
field effect transistors

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Bimaterial electromechanical systems for a biomimetical acoustic sensor. / Mastropaolo, Enrico; Rhonira, Latif; Koickal, Thomas; Hamilton, Alister; Cheung, Rebecca; Newton, Michael; Smith, Leslie.

In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, Vol. 30, No. 6, 06FD01, 11.2012.

Research output: Contribution to journalArticle

Mastropaolo, Enrico ; Rhonira, Latif ; Koickal, Thomas ; Hamilton, Alister ; Cheung, Rebecca ; Newton, Michael ; Smith, Leslie. / Bimaterial electromechanical systems for a biomimetical acoustic sensor. In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 2012 ; Vol. 30, No. 6.
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