Bi-Ti-O thin films for piezoelectric pressure sensors

Chong Cheong Wei, Muhammad Yahaya, Muhamad Mat Salleh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Polycrystalline Bi-Ti-O thin films were prepared by multilayer deposition method using electron beam evaporation. The thin films were obtained by sequentially evaporating Bi 2O 3 / TiO 2 layers on Si / SiO 2 substrate followed by a heat treatment for 2 hours in air at 900 °C. The piezoelectric response of the sample was measured by pneumatic loading method. A pressure sensor was fabricated by annealed the deposited multilayer thin films on Si / SiO 2 /Au substrate and Al was then deposited as top electrode. When an air pressure was applied and imparted on the sensor, electrical voltage was generated and measured using an electrometer. The sensor's response was measured at three response cycles. It was found that the sensor has good voltage sensitivity and repeatability. The study shows the possibility to obtain Bi-Ti-O thin film pressure sensor by electron beam multilayer deposition.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsJ.-C. Chiao, A.J. Hariz, D.N. Jamieson, G. Parish, V.K. Varadan
Pages324-331
Number of pages8
Volume5276
DOIs
Publication statusPublished - 2004
EventDevice and Process Technologies for MEMS, Microelectronics, and Photonics III - Perth, WA, Australia
Duration: 10 Dec 200312 Dec 2003

Other

OtherDevice and Process Technologies for MEMS, Microelectronics, and Photonics III
CountryAustralia
CityPerth, WA
Period10/12/0312/12/03

Fingerprint

Pressure sensors
pressure sensors
Thin films
thin films
Electron beams
sensors
Sensors
Multilayers
electron beams
Electrometers
electrometers
pneumatics
Multilayer films
air
Electric potential
electric potential
Substrates
Air
Pneumatics
Evaporation

Keywords

  • Bi-Ti-O thin films
  • Electron beam evaporation
  • Multilayer deposition
  • Piezoelectric
  • Pressure sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Wei, C. C., Yahaya, M., & Mat Salleh, M. (2004). Bi-Ti-O thin films for piezoelectric pressure sensors. In J-C. Chiao, A. J. Hariz, D. N. Jamieson, G. Parish, & V. K. Varadan (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5276, pp. 324-331) https://doi.org/10.1117/12.522281

Bi-Ti-O thin films for piezoelectric pressure sensors. / Wei, Chong Cheong; Yahaya, Muhammad; Mat Salleh, Muhamad.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / J.-C. Chiao; A.J. Hariz; D.N. Jamieson; G. Parish; V.K. Varadan. Vol. 5276 2004. p. 324-331.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wei, CC, Yahaya, M & Mat Salleh, M 2004, Bi-Ti-O thin films for piezoelectric pressure sensors. in J-C Chiao, AJ Hariz, DN Jamieson, G Parish & VK Varadan (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5276, pp. 324-331, Device and Process Technologies for MEMS, Microelectronics, and Photonics III, Perth, WA, Australia, 10/12/03. https://doi.org/10.1117/12.522281
Wei CC, Yahaya M, Mat Salleh M. Bi-Ti-O thin films for piezoelectric pressure sensors. In Chiao J-C, Hariz AJ, Jamieson DN, Parish G, Varadan VK, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5276. 2004. p. 324-331 https://doi.org/10.1117/12.522281
Wei, Chong Cheong ; Yahaya, Muhammad ; Mat Salleh, Muhamad. / Bi-Ti-O thin films for piezoelectric pressure sensors. Proceedings of SPIE - The International Society for Optical Engineering. editor / J.-C. Chiao ; A.J. Hariz ; D.N. Jamieson ; G. Parish ; V.K. Varadan. Vol. 5276 2004. pp. 324-331
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