BaTiO3 nanocomposite thin film as pyroelectric sensor

Azmi Ibrahim, Muhammad Yahaya, Muhamad Mat Salleh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

BaTiO3 thin films are commonly used as a pyroelecrtic sensor because this material has a good dielectric, ferroelectric and piezoelectric properties. This paper reports the pyroelectric sensor performance of BaTiO 3 nanocomposite thin films. The BaTiO3 nanoparticles were synthesized and deposited as nanocomposite thin films on Si/SiO 2/RuO2 substrate using spin coating technique. The deposited films were dried at 200 °C for 2 hours and annealed at 700 °C for 1 hour in air. Pyroelectric performance of the fabricated sensor was carried out at temperature in the range of 30 to 58 °C using short-circuit current method. The heating rate was set up to 0.4 °C/s. It was found the device showed the pyroelectric response when heated and the pyroelectric coefficients of the device are in the range of 43-1300 μ C cm-2 K-1. "2004 IEEE.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages415-418
Number of pages4
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Nanocomposite films
Thin films
Sensors
Coating techniques
Spin coating
Heating rate
Short circuit currents
Ferroelectric materials
Nanoparticles
Substrates
Air
Temperature

Keywords

  • BaTiO thin films
  • Nanoparticles
  • Pyroelectric

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ibrahim, A., Yahaya, M., & Mat Salleh, M. (2004). BaTiO3 nanocomposite thin film as pyroelectric sensor. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 415-418). [1620916]

BaTiO3 nanocomposite thin film as pyroelectric sensor. / Ibrahim, Azmi; Yahaya, Muhammad; Mat Salleh, Muhamad.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 415-418 1620916.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ibrahim, A, Yahaya, M & Mat Salleh, M 2004, BaTiO3 nanocomposite thin film as pyroelectric sensor. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620916, pp. 415-418, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Ibrahim A, Yahaya M, Mat Salleh M. BaTiO3 nanocomposite thin film as pyroelectric sensor. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 415-418. 1620916
Ibrahim, Azmi ; Yahaya, Muhammad ; Mat Salleh, Muhamad. / BaTiO3 nanocomposite thin film as pyroelectric sensor. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 415-418
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