BaTiO 3 nanocomposite thin films as pyroelectric sensor

Muhamad Mat Salleh, Azmi Ibrahim, Muhammad Yahaya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

BaTiO 3 thin films are commonly used as a pyroelecrtic sensor because this material has a good dielectric, ferroelectric and piezoelectric properties. This paper reports the pyroelectric sensor performance of BaTiO 3/SiO 2 nanocomposite thin films. The BaTiO 3 nanoparticles were synthesized and deposited as nanocomposite thin films on Si/SiO 2 substrates using spin coating technique. The deposited films were dried at 200°C for 2 hours and annealed at 700°C for 1 hour in air. Pyroelectric performance of the fabricated sensors was carried out at temperature in the range of 30 to 58°C using short-circuit current method. The heating rate was set up to 0.4°C/s. It was found the devices showed the pyroelectric response when heated and the pyroelectric coefficients of the devices are in the range of 43-1300 μC cm -2 K -1.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsC. Cane, J.-C. Chiao, F.V. Verdu
Pages35-40
Number of pages6
Volume5836
DOIs
Publication statusPublished - 2005
EventSmart Sensors, Actuators, and MEMS II - Seville, Spain
Duration: 9 May 200511 May 2005

Other

OtherSmart Sensors, Actuators, and MEMS II
CountrySpain
CitySeville
Period9/5/0511/5/05

Fingerprint

Nanocomposite films
nanocomposites
Thin films
sensors
Sensors
thin films
Coating techniques
Spin coating
short circuit currents
Heating rate
Short circuit currents
Ferroelectric materials
coating
dielectric properties
Nanoparticles
nanoparticles
heating
air
Substrates
coefficients

Keywords

  • BaTiO nanoparticles
  • BaTiO SiO nanocomposite
  • Pyroelectric sensor
  • Spin coating
  • Thin films

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Mat Salleh, M., Ibrahim, A., & Yahaya, M. (2005). BaTiO 3 nanocomposite thin films as pyroelectric sensor In C. Cane, J-C. Chiao, & F. V. Verdu (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5836, pp. 35-40). [04] https://doi.org/10.1117/12.607717

BaTiO 3 nanocomposite thin films as pyroelectric sensor . / Mat Salleh, Muhamad; Ibrahim, Azmi; Yahaya, Muhammad.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / C. Cane; J.-C. Chiao; F.V. Verdu. Vol. 5836 2005. p. 35-40 04.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mat Salleh, M, Ibrahim, A & Yahaya, M 2005, BaTiO 3 nanocomposite thin films as pyroelectric sensor in C Cane, J-C Chiao & FV Verdu (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5836, 04, pp. 35-40, Smart Sensors, Actuators, and MEMS II, Seville, Spain, 9/5/05. https://doi.org/10.1117/12.607717
Mat Salleh M, Ibrahim A, Yahaya M. BaTiO 3 nanocomposite thin films as pyroelectric sensor In Cane C, Chiao J-C, Verdu FV, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5836. 2005. p. 35-40. 04 https://doi.org/10.1117/12.607717
Mat Salleh, Muhamad ; Ibrahim, Azmi ; Yahaya, Muhammad. / BaTiO 3 nanocomposite thin films as pyroelectric sensor Proceedings of SPIE - The International Society for Optical Engineering. editor / C. Cane ; J.-C. Chiao ; F.V. Verdu. Vol. 5836 2005. pp. 35-40
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