Application of barium strontium titanate thin film as distance sensor

Nur Hanani Zainal Abedin, Muhamad Mat Salleh, Noor Baa`Yah Ibrahim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Distance sensors are very important for anti-collision sensors in automotives. This paper reports the application of Barium Strontium Titanate Ba1-xSrxTiO3 (BST) thin film as distance sensor using a bolometric method. Capacitance device with structure of Al/BST/TiO 2/RuO2/SiO2/Si was fabricated. The BST film was prepared using RF Magnetron Sputtering. The device was then illuminated with an infrared light source from an LED with a peak wavelength at 830 nm. The illumination has increased the temperature of the film, hence changed the capacitance. The change in the capacitance was detected through the voltage changed in the device. It was found that the change of the voltage was decreased with the increment of distance film to the light source. Barium strontium titanate, ferroelectric bolometer, distance sensor

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages615-617
Number of pages3
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Barium strontium titanate
Thin films
Capacitance
Sensors
Light sources
Bolometers
Electric potential
Magnetron sputtering
Ferroelectric materials
Light emitting diodes
Lighting
Infrared radiation
Wavelength
Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Abedin, N. H. Z., Mat Salleh, M., & Ibrahim, N. BY. (2004). Application of barium strontium titanate thin film as distance sensor. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 615-617). [1620961]

Application of barium strontium titanate thin film as distance sensor. / Abedin, Nur Hanani Zainal; Mat Salleh, Muhamad; Ibrahim, Noor Baa`Yah.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 615-617 1620961.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abedin, NHZ, Mat Salleh, M & Ibrahim, NBY 2004, Application of barium strontium titanate thin film as distance sensor. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620961, pp. 615-617, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Abedin NHZ, Mat Salleh M, Ibrahim NBY. Application of barium strontium titanate thin film as distance sensor. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 615-617. 1620961
Abedin, Nur Hanani Zainal ; Mat Salleh, Muhamad ; Ibrahim, Noor Baa`Yah. / Application of barium strontium titanate thin film as distance sensor. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 615-617
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