Annealing effects on structural and electrical properties of micro heater conductor element

Norihan Abdul Hamid, Burhanuddin Yeop Majlis, Jumril Yunas, Arash Dehzangi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents an analysis and investigation of the effect thermal anealing treatment on structural and electrical properties of micro heater conductor. Conventional micro fabrication process has given a higher resistance impact on the heater conductor properties. Higher conductor resistance obtains higher source for micro heater to be operated. Since the micro heater is used for micron-sized devices, only small amount of source is consumed for the micro component. Therefore annealing process is necessary to reduce the resistance of metal conductor heater. In this work, the thermal annealing treatment process was carried out in nitrogen atmosphere at temperature of 450°C for 30 minutes. Structural properties were studied using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) while an electrical property was investigated using heater characterization measurement and testing. The analysis shows that thermal annealing treatment improved the electrical properties of the heater conductor element and provided some changes in samples, such as the grain size increment or the decrease of the strain.

Original languageEnglish
Title of host publicationProceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics
Pages77-80
Number of pages4
DOIs
Publication statusPublished - 2013
Event2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013 - Langkawi
Duration: 25 Sep 201327 Sep 2013

Other

Other2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013
CityLangkawi
Period25/9/1327/9/13

Fingerprint

Structural properties
Electric properties
Annealing
Impact resistance
Microfabrication
Atomic force microscopy
Heat treatment
Nitrogen
Scanning electron microscopy
Testing
Metals
Temperature
Hot Temperature

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Hamid, N. A., Yeop Majlis, B., Yunas, J., & Dehzangi, A. (2013). Annealing effects on structural and electrical properties of micro heater conductor element. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics (pp. 77-80). [6706477] https://doi.org/10.1109/RSM.2013.6706477

Annealing effects on structural and electrical properties of micro heater conductor element. / Hamid, Norihan Abdul; Yeop Majlis, Burhanuddin; Yunas, Jumril; Dehzangi, Arash.

Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 77-80 6706477.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hamid, NA, Yeop Majlis, B, Yunas, J & Dehzangi, A 2013, Annealing effects on structural and electrical properties of micro heater conductor element. in Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics., 6706477, pp. 77-80, 2013 IEEE Regional Symposium on Micro and Nano Electronics, RSM 2013, Langkawi, 25/9/13. https://doi.org/10.1109/RSM.2013.6706477
Hamid NA, Yeop Majlis B, Yunas J, Dehzangi A. Annealing effects on structural and electrical properties of micro heater conductor element. In Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. p. 77-80. 6706477 https://doi.org/10.1109/RSM.2013.6706477
Hamid, Norihan Abdul ; Yeop Majlis, Burhanuddin ; Yunas, Jumril ; Dehzangi, Arash. / Annealing effects on structural and electrical properties of micro heater conductor element. Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics. 2013. pp. 77-80
@inproceedings{a065ef32f0c94be686b65598198af22f,
title = "Annealing effects on structural and electrical properties of micro heater conductor element",
abstract = "This paper presents an analysis and investigation of the effect thermal anealing treatment on structural and electrical properties of micro heater conductor. Conventional micro fabrication process has given a higher resistance impact on the heater conductor properties. Higher conductor resistance obtains higher source for micro heater to be operated. Since the micro heater is used for micron-sized devices, only small amount of source is consumed for the micro component. Therefore annealing process is necessary to reduce the resistance of metal conductor heater. In this work, the thermal annealing treatment process was carried out in nitrogen atmosphere at temperature of 450°C for 30 minutes. Structural properties were studied using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) while an electrical property was investigated using heater characterization measurement and testing. The analysis shows that thermal annealing treatment improved the electrical properties of the heater conductor element and provided some changes in samples, such as the grain size increment or the decrease of the strain.",
author = "Hamid, {Norihan Abdul} and {Yeop Majlis}, Burhanuddin and Jumril Yunas and Arash Dehzangi",
year = "2013",
doi = "10.1109/RSM.2013.6706477",
language = "English",
isbn = "9781479911837",
pages = "77--80",
booktitle = "Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics",

}

TY - GEN

T1 - Annealing effects on structural and electrical properties of micro heater conductor element

AU - Hamid, Norihan Abdul

AU - Yeop Majlis, Burhanuddin

AU - Yunas, Jumril

AU - Dehzangi, Arash

PY - 2013

Y1 - 2013

N2 - This paper presents an analysis and investigation of the effect thermal anealing treatment on structural and electrical properties of micro heater conductor. Conventional micro fabrication process has given a higher resistance impact on the heater conductor properties. Higher conductor resistance obtains higher source for micro heater to be operated. Since the micro heater is used for micron-sized devices, only small amount of source is consumed for the micro component. Therefore annealing process is necessary to reduce the resistance of metal conductor heater. In this work, the thermal annealing treatment process was carried out in nitrogen atmosphere at temperature of 450°C for 30 minutes. Structural properties were studied using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) while an electrical property was investigated using heater characterization measurement and testing. The analysis shows that thermal annealing treatment improved the electrical properties of the heater conductor element and provided some changes in samples, such as the grain size increment or the decrease of the strain.

AB - This paper presents an analysis and investigation of the effect thermal anealing treatment on structural and electrical properties of micro heater conductor. Conventional micro fabrication process has given a higher resistance impact on the heater conductor properties. Higher conductor resistance obtains higher source for micro heater to be operated. Since the micro heater is used for micron-sized devices, only small amount of source is consumed for the micro component. Therefore annealing process is necessary to reduce the resistance of metal conductor heater. In this work, the thermal annealing treatment process was carried out in nitrogen atmosphere at temperature of 450°C for 30 minutes. Structural properties were studied using Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) while an electrical property was investigated using heater characterization measurement and testing. The analysis shows that thermal annealing treatment improved the electrical properties of the heater conductor element and provided some changes in samples, such as the grain size increment or the decrease of the strain.

UR - http://www.scopus.com/inward/record.url?scp=84893527615&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893527615&partnerID=8YFLogxK

U2 - 10.1109/RSM.2013.6706477

DO - 10.1109/RSM.2013.6706477

M3 - Conference contribution

AN - SCOPUS:84893527615

SN - 9781479911837

SP - 77

EP - 80

BT - Proceedings - RSM 2013: 2013 IEEE Regional Symposium on Micro and Nano Electronics

ER -