Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS)

Farizah Saharil, Agus Santoso Tamsir, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents new analytical study on the capacitive accelerometer's fingers which utilizes branched comb finger electrode instead of the conventional straight tinger electrode. It employs capacitive sensing using overlaparea variation between comb electrode and the suspension beam to provide higher sensitivity without compromising pull-in voltage, full-scale range, or bandwidth besides the ease of fabrication. Mathematical formulations of each structure are derived and analyzed using numerical analysis. Three shapes of finger electrodes, which consist of branched fingers, triangle shaped fmgers and semicircle shaped fingers are compared to obtain the optimal shape with the highest capacitance and sensitivity. The result shows that the semi-circle shaped electrodes have the highest capacitance of 915 fF and sensitivity of -449.4 pF/ μm for a single 240 pm x 4.6 μm suspension beam with 3 μm structure thickness followed by the triangle shaped fingers with capacitance of 29 fF and -124.7 pF/μm and the branched comb lingers with 42.5 fF and -106.3 pF/ μm.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages552-556
Number of pages5
Publication statusPublished - 2002
Event2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang
Duration: 19 Dec 200221 Dec 2002

Other

Other2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002
CityPenang
Period19/12/0221/12/02

Fingerprint

Accelerometers
MEMS
Electrodes
Capacitance
Suspensions
Numerical analysis
Bandwidth
Fabrication
Electric potential

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Saharil, F., Tamsir, A. S., & Yeop Majlis, B. (2002). Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS). In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 552-556). [1217884]

Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS). / Saharil, Farizah; Tamsir, Agus Santoso; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 552-556 1217884.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Saharil, F, Tamsir, AS & Yeop Majlis, B 2002, Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS). in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 1217884, pp. 552-556, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.
Saharil F, Tamsir AS, Yeop Majlis B. Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS). In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 552-556. 1217884
Saharil, Farizah ; Tamsir, Agus Santoso ; Yeop Majlis, Burhanuddin. / Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS). IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. pp. 552-556
@inproceedings{c3b329f8d2194622b492ed8806c6e2d9,
title = "Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS)",
abstract = "This paper presents new analytical study on the capacitive accelerometer's fingers which utilizes branched comb finger electrode instead of the conventional straight tinger electrode. It employs capacitive sensing using overlaparea variation between comb electrode and the suspension beam to provide higher sensitivity without compromising pull-in voltage, full-scale range, or bandwidth besides the ease of fabrication. Mathematical formulations of each structure are derived and analyzed using numerical analysis. Three shapes of finger electrodes, which consist of branched fingers, triangle shaped fmgers and semicircle shaped fingers are compared to obtain the optimal shape with the highest capacitance and sensitivity. The result shows that the semi-circle shaped electrodes have the highest capacitance of 915 fF and sensitivity of -449.4 pF/ μm for a single 240 pm x 4.6 μm suspension beam with 3 μm structure thickness followed by the triangle shaped fingers with capacitance of 29 fF and -124.7 pF/μm and the branched comb lingers with 42.5 fF and -106.3 pF/ μm.",
author = "Farizah Saharil and Tamsir, {Agus Santoso} and {Yeop Majlis}, Burhanuddin",
year = "2002",
language = "English",
isbn = "0780375785",
pages = "552--556",
booktitle = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",

}

TY - GEN

T1 - Analytical study on the capacitive accelerometer's fingers in microelectromechanical systems (MEMS)

AU - Saharil, Farizah

AU - Tamsir, Agus Santoso

AU - Yeop Majlis, Burhanuddin

PY - 2002

Y1 - 2002

N2 - This paper presents new analytical study on the capacitive accelerometer's fingers which utilizes branched comb finger electrode instead of the conventional straight tinger electrode. It employs capacitive sensing using overlaparea variation between comb electrode and the suspension beam to provide higher sensitivity without compromising pull-in voltage, full-scale range, or bandwidth besides the ease of fabrication. Mathematical formulations of each structure are derived and analyzed using numerical analysis. Three shapes of finger electrodes, which consist of branched fingers, triangle shaped fmgers and semicircle shaped fingers are compared to obtain the optimal shape with the highest capacitance and sensitivity. The result shows that the semi-circle shaped electrodes have the highest capacitance of 915 fF and sensitivity of -449.4 pF/ μm for a single 240 pm x 4.6 μm suspension beam with 3 μm structure thickness followed by the triangle shaped fingers with capacitance of 29 fF and -124.7 pF/μm and the branched comb lingers with 42.5 fF and -106.3 pF/ μm.

AB - This paper presents new analytical study on the capacitive accelerometer's fingers which utilizes branched comb finger electrode instead of the conventional straight tinger electrode. It employs capacitive sensing using overlaparea variation between comb electrode and the suspension beam to provide higher sensitivity without compromising pull-in voltage, full-scale range, or bandwidth besides the ease of fabrication. Mathematical formulations of each structure are derived and analyzed using numerical analysis. Three shapes of finger electrodes, which consist of branched fingers, triangle shaped fmgers and semicircle shaped fingers are compared to obtain the optimal shape with the highest capacitance and sensitivity. The result shows that the semi-circle shaped electrodes have the highest capacitance of 915 fF and sensitivity of -449.4 pF/ μm for a single 240 pm x 4.6 μm suspension beam with 3 μm structure thickness followed by the triangle shaped fingers with capacitance of 29 fF and -124.7 pF/μm and the branched comb lingers with 42.5 fF and -106.3 pF/ μm.

UR - http://www.scopus.com/inward/record.url?scp=79251636027&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79251636027&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0780375785

SN - 9780780375789

SP - 552

EP - 556

BT - IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

ER -