Analysis of the effect of growth parameters on graphene synthesized by chemical vapor deposition

Norlida Ramli, Nazrul Anuar Nayan, Hing Wah Lee, Saat Shukri Embong

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Chemical vapor deposition (CVD) has emerged as an important method for the preparation and production of graphene for various applications. This study analyzes previous work on various parameters that affect the properties of graphene synthesized through the CVD method. These parameters include the growth temperature, the growth time, and the flow rate of the carbon precursor. The characteristics of graphene synthesized under different conditions are compared in terms of the number of layers and the defect concentration, as determined by Raman spectroscopy and scanning electron microscopy (SEM). This comparison reveals that graphene grown on copper with a relatively low flow rate of precursor, a short growth time, and a high growth temperature exhibits the best quality. The optimum parameters required to produce graphene with high quality and with a low concentration of defects, both of which are essential in the development of graphene as a sensing material, are ascertained in this review.

Original languageEnglish
Pages (from-to)50-55
Number of pages6
JournalJournal of Nanoelectronics and Optoelectronics
Volume10
Issue number1
DOIs
Publication statusPublished - 1 Apr 2015

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Graphite
Graphene
Chemical vapor deposition
Growth temperature
Flow rate
Defects
Raman spectroscopy
Copper
Carbon
Scanning electron microscopy

Keywords

  • Chemical vapor deposition
  • Graphene
  • Growth parameters
  • Raman spectroscopy

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Analysis of the effect of growth parameters on graphene synthesized by chemical vapor deposition. / Ramli, Norlida; Nayan, Nazrul Anuar; Lee, Hing Wah; Embong, Saat Shukri.

In: Journal of Nanoelectronics and Optoelectronics, Vol. 10, No. 1, 01.04.2015, p. 50-55.

Research output: Contribution to journalArticle

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