Analysis of metal catalyst etching in graphene transfer process

Nazrul Anuar Nayan, Norlida Ramli

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Before graphene can be applied to a device, it should first be transferred from the surface of the catalyst to the surface of the silicon substrate. The most commonly used transfer methods start with adhesion on a polymethyl methacrylate film. This film supports the graphene film and prevents folding while the copper catalyst is etched away in ferric chloride (FeCl3) solution. In this study, we analyzed the molarity and temperature of FeCl3 during the graphene transfer process. Raman spectroscopy and scanning electron microscopy were used to characterize the transferred graphene by its number of layers, uniformity, and produced defects. We found that optimum parameters of FeCl3 are required to produce high-quality graphene with low defects. Results show that molarity of 0.5 M and a temperature of 40 °C produced the best quality graphene that yielded monolayer graphene and the best surface uniformity. This etchant optimization study will provide a new understanding of the production of a better transferred graphene.

Original languageEnglish
Pages (from-to)7815-7822
Number of pages8
JournalInternational Journal of Applied Engineering Research
Volume11
Issue number12
Publication statusPublished - 2016

Fingerprint

Graphene
Etching
Catalysts
Metals
Defects
Polymethyl methacrylates
Raman spectroscopy
Monolayers
Adhesion
Copper
Silicon
Temperature
Scanning electron microscopy
Substrates

Keywords

  • Etchant
  • FeCl
  • Graphene
  • Molarity
  • PMMA film
  • Transfer process

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Analysis of metal catalyst etching in graphene transfer process. / Nayan, Nazrul Anuar; Ramli, Norlida.

In: International Journal of Applied Engineering Research, Vol. 11, No. 12, 2016, p. 7815-7822.

Research output: Contribution to journalArticle

@article{105ffd2d61b04ecb92439acade7ee303,
title = "Analysis of metal catalyst etching in graphene transfer process",
abstract = "Before graphene can be applied to a device, it should first be transferred from the surface of the catalyst to the surface of the silicon substrate. The most commonly used transfer methods start with adhesion on a polymethyl methacrylate film. This film supports the graphene film and prevents folding while the copper catalyst is etched away in ferric chloride (FeCl3) solution. In this study, we analyzed the molarity and temperature of FeCl3 during the graphene transfer process. Raman spectroscopy and scanning electron microscopy were used to characterize the transferred graphene by its number of layers, uniformity, and produced defects. We found that optimum parameters of FeCl3 are required to produce high-quality graphene with low defects. Results show that molarity of 0.5 M and a temperature of 40 °C produced the best quality graphene that yielded monolayer graphene and the best surface uniformity. This etchant optimization study will provide a new understanding of the production of a better transferred graphene.",
keywords = "Etchant, FeCl, Graphene, Molarity, PMMA film, Transfer process",
author = "Nayan, {Nazrul Anuar} and Norlida Ramli",
year = "2016",
language = "English",
volume = "11",
pages = "7815--7822",
journal = "International Journal of Applied Engineering Research",
issn = "0973-4562",
publisher = "Research India Publications",
number = "12",

}

TY - JOUR

T1 - Analysis of metal catalyst etching in graphene transfer process

AU - Nayan, Nazrul Anuar

AU - Ramli, Norlida

PY - 2016

Y1 - 2016

N2 - Before graphene can be applied to a device, it should first be transferred from the surface of the catalyst to the surface of the silicon substrate. The most commonly used transfer methods start with adhesion on a polymethyl methacrylate film. This film supports the graphene film and prevents folding while the copper catalyst is etched away in ferric chloride (FeCl3) solution. In this study, we analyzed the molarity and temperature of FeCl3 during the graphene transfer process. Raman spectroscopy and scanning electron microscopy were used to characterize the transferred graphene by its number of layers, uniformity, and produced defects. We found that optimum parameters of FeCl3 are required to produce high-quality graphene with low defects. Results show that molarity of 0.5 M and a temperature of 40 °C produced the best quality graphene that yielded monolayer graphene and the best surface uniformity. This etchant optimization study will provide a new understanding of the production of a better transferred graphene.

AB - Before graphene can be applied to a device, it should first be transferred from the surface of the catalyst to the surface of the silicon substrate. The most commonly used transfer methods start with adhesion on a polymethyl methacrylate film. This film supports the graphene film and prevents folding while the copper catalyst is etched away in ferric chloride (FeCl3) solution. In this study, we analyzed the molarity and temperature of FeCl3 during the graphene transfer process. Raman spectroscopy and scanning electron microscopy were used to characterize the transferred graphene by its number of layers, uniformity, and produced defects. We found that optimum parameters of FeCl3 are required to produce high-quality graphene with low defects. Results show that molarity of 0.5 M and a temperature of 40 °C produced the best quality graphene that yielded monolayer graphene and the best surface uniformity. This etchant optimization study will provide a new understanding of the production of a better transferred graphene.

KW - Etchant

KW - FeCl

KW - Graphene

KW - Molarity

KW - PMMA film

KW - Transfer process

UR - http://www.scopus.com/inward/record.url?scp=84989208912&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84989208912&partnerID=8YFLogxK

M3 - Article

VL - 11

SP - 7815

EP - 7822

JO - International Journal of Applied Engineering Research

JF - International Journal of Applied Engineering Research

SN - 0973-4562

IS - 12

ER -