Analysis of electrical responses of MEMS piezoresistive microcantilever

Rosminazuin Ab Rahim, Sheik Fareed Ookar Abubakkar, Badariah Bais, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, an optimization of mechanical and electrical performance of single-layer silicon piezoresistive micro cantilever (PRM) sensor in which both piezoresistor and micro cantilever structures are made of the same material of single-crystalline silicon was discussed. Using Covent or Ware 2008, the mechanical and electrical behaviors of the PRM structure was investigated by studying few contributing factors that affect the performance of the device. The performance of PRM sensor was investigated by observing the effects of applied loads to the current change and sensitivity of the device. Apart from that, the effects of thermal noise to the device's performance were also investigated. From the simulation results, at applied loads between 1 to 10 μN, significant current increase of about 0.094% was observed. This current increase can be translated into an increase of sensitivity in the device. Simulation results also revealed that at temperature change between 290 K to 300 K, the PRM sensor shows insignificant change to sensitivity.

Original languageEnglish
Title of host publicationProceedings - 5th International Conference on Computer and Communication Engineering: Emerging Technologies via Comp-Unication Convergence, ICCCE 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages123-126
Number of pages4
ISBN (Print)9781479976355
DOIs
Publication statusPublished - 4 Feb 2015
Event5th International Conference on Computer and Communication Engineering, ICCCE 2014 - Kuala Lumpur
Duration: 23 Sep 201424 Sep 2014

Other

Other5th International Conference on Computer and Communication Engineering, ICCCE 2014
CityKuala Lumpur
Period23/9/1424/9/14

Fingerprint

MEMS
Sensors
performance
Silicon
Thermal noise
simulation
Crystalline materials
Temperature

Keywords

  • Coventor Ware 2008
  • MEMS
  • microcantilever
  • piezoresistor

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Communication

Cite this

Rahim, R. A., Abubakkar, S. F. O., Bais, B., & Yeop Majlis, B. (2015). Analysis of electrical responses of MEMS piezoresistive microcantilever. In Proceedings - 5th International Conference on Computer and Communication Engineering: Emerging Technologies via Comp-Unication Convergence, ICCCE 2014 (pp. 123-126). [7031616] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICCCE.2014.45

Analysis of electrical responses of MEMS piezoresistive microcantilever. / Rahim, Rosminazuin Ab; Abubakkar, Sheik Fareed Ookar; Bais, Badariah; Yeop Majlis, Burhanuddin.

Proceedings - 5th International Conference on Computer and Communication Engineering: Emerging Technologies via Comp-Unication Convergence, ICCCE 2014. Institute of Electrical and Electronics Engineers Inc., 2015. p. 123-126 7031616.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rahim, RA, Abubakkar, SFO, Bais, B & Yeop Majlis, B 2015, Analysis of electrical responses of MEMS piezoresistive microcantilever. in Proceedings - 5th International Conference on Computer and Communication Engineering: Emerging Technologies via Comp-Unication Convergence, ICCCE 2014., 7031616, Institute of Electrical and Electronics Engineers Inc., pp. 123-126, 5th International Conference on Computer and Communication Engineering, ICCCE 2014, Kuala Lumpur, 23/9/14. https://doi.org/10.1109/ICCCE.2014.45
Rahim RA, Abubakkar SFO, Bais B, Yeop Majlis B. Analysis of electrical responses of MEMS piezoresistive microcantilever. In Proceedings - 5th International Conference on Computer and Communication Engineering: Emerging Technologies via Comp-Unication Convergence, ICCCE 2014. Institute of Electrical and Electronics Engineers Inc. 2015. p. 123-126. 7031616 https://doi.org/10.1109/ICCCE.2014.45
Rahim, Rosminazuin Ab ; Abubakkar, Sheik Fareed Ookar ; Bais, Badariah ; Yeop Majlis, Burhanuddin. / Analysis of electrical responses of MEMS piezoresistive microcantilever. Proceedings - 5th International Conference on Computer and Communication Engineering: Emerging Technologies via Comp-Unication Convergence, ICCCE 2014. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 123-126
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