Analysis and design of a wide micro beam as a pressure gauge for high sensitivity MEMS fingerprint sensors

Mitra Damghanian, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Sensitivity improvement is a challenging issue in miniature pressure sensors. To improve sensitivity and linearity of the device, a wide micro beam structure has been proposed to gauge capacitance changes caused by the applied pressure in a capacitive MEMS fingerprint sensor. Bending behavior of the device and the effect of the protrusion geometry on partial loading of the micro beam has been analytically investigated. Based on the idea of efficient loading of the wide micro beam, an improved design for the capacitive fingerprint sensor is developed to increase sensitivity. It is shown with FEM simulations that the micro wide beam design is superior to the common membrane based MEMS fingerprint sensors in terms of sensitivity and linearity.

Original languageEnglish
Pages (from-to)731-737
Number of pages7
JournalMicrosystem Technologies
Volume15
Issue number5
DOIs
Publication statusPublished - May 2009

Fingerprint

pressure gages
Pressure gages
microelectromechanical systems
MEMS
Capacitive sensors
sensitivity
sensors
Sensors
Pressure sensors
Gages
linearity
Capacitance
Membranes
Finite element method
Geometry
pressure sensors
capacitance
membranes
geometry
simulation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Analysis and design of a wide micro beam as a pressure gauge for high sensitivity MEMS fingerprint sensors. / Damghanian, Mitra; Yeop Majlis, Burhanuddin.

In: Microsystem Technologies, Vol. 15, No. 5, 05.2009, p. 731-737.

Research output: Contribution to journalArticle

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