An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor

Norhayati Soin, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

Understanding the deflection behavior of micro-machined diaphragms is necessary for designing mechanical sensors such as pressure sensors. An analytical study on the diaphragm behavior with different structures for micro-machined capacitive pressure sensor is presented in this paper. In general, analytical solutions for diaphragm behavior are desirable because of their ease and the insight they provide to the designer. Specific geometric effects can be ascertained form these solutions. However, these solutions are generally only applicable for small deflections. The behaviors of flat and corrugated diaphragms with various structural parameters and properties are analysed using the classical Timoshenko plate theory respectively.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages505-510
Number of pages6
Publication statusPublished - 2002
Event2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang
Duration: 19 Dec 200221 Dec 2002

Other

Other2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002
CityPenang
Period19/12/0221/12/02

Fingerprint

Capacitive sensors
Pressure sensors
Diaphragms
Sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Soin, N., & Yeop Majlis, B. (2002). An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 505-510). [1217874]

An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor. / Soin, Norhayati; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 505-510 1217874.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Soin, N & Yeop Majlis, B 2002, An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 1217874, pp. 505-510, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.
Soin N, Yeop Majlis B. An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 505-510. 1217874
Soin, Norhayati ; Yeop Majlis, Burhanuddin. / An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. pp. 505-510
@inproceedings{bfe9ec9bf1a2421ebd51f2ec0c620534,
title = "An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor",
abstract = "Understanding the deflection behavior of micro-machined diaphragms is necessary for designing mechanical sensors such as pressure sensors. An analytical study on the diaphragm behavior with different structures for micro-machined capacitive pressure sensor is presented in this paper. In general, analytical solutions for diaphragm behavior are desirable because of their ease and the insight they provide to the designer. Specific geometric effects can be ascertained form these solutions. However, these solutions are generally only applicable for small deflections. The behaviors of flat and corrugated diaphragms with various structural parameters and properties are analysed using the classical Timoshenko plate theory respectively.",
author = "Norhayati Soin and {Yeop Majlis}, Burhanuddin",
year = "2002",
language = "English",
isbn = "0780375785",
pages = "505--510",
booktitle = "IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE",

}

TY - GEN

T1 - An analytical study on diaphragm behavior for micro-machined capacitive pressure sensor

AU - Soin, Norhayati

AU - Yeop Majlis, Burhanuddin

PY - 2002

Y1 - 2002

N2 - Understanding the deflection behavior of micro-machined diaphragms is necessary for designing mechanical sensors such as pressure sensors. An analytical study on the diaphragm behavior with different structures for micro-machined capacitive pressure sensor is presented in this paper. In general, analytical solutions for diaphragm behavior are desirable because of their ease and the insight they provide to the designer. Specific geometric effects can be ascertained form these solutions. However, these solutions are generally only applicable for small deflections. The behaviors of flat and corrugated diaphragms with various structural parameters and properties are analysed using the classical Timoshenko plate theory respectively.

AB - Understanding the deflection behavior of micro-machined diaphragms is necessary for designing mechanical sensors such as pressure sensors. An analytical study on the diaphragm behavior with different structures for micro-machined capacitive pressure sensor is presented in this paper. In general, analytical solutions for diaphragm behavior are desirable because of their ease and the insight they provide to the designer. Specific geometric effects can be ascertained form these solutions. However, these solutions are generally only applicable for small deflections. The behaviors of flat and corrugated diaphragms with various structural parameters and properties are analysed using the classical Timoshenko plate theory respectively.

UR - http://www.scopus.com/inward/record.url?scp=84864684267&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864684267&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0780375785

SN - 9780780375789

SP - 505

EP - 510

BT - IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

ER -