Aluminum based two-port-clamped-clamped resonators

Mustafa Al Khusheiny, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper a new structure of clamped-clamped μresonator (CCMR) of resonance frequency (fo) of 180 kHz, is designed, modeled, fabricated and tested, using aluminum as structural material. IntelliSuite simulator is used to model the mechanical properties of the new MEMS resonator using a static displacement analysis and to get the optimum values of the beams parameters. The effective spring constant and mass of the resonator were calculated using a special proposed simulator, based on Mapple, besides using it to model the mechanical parameters into equivalent electrical circuit for the resonator, and determine the electrical properties just by giving the physical dimensions of the μresonator. Surface micromachining technology was used to fabricate the proposed MEMS resonator in IMEN's Clean Room.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages188-192
Number of pages5
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Resonators
Aluminum
MEMS
Simulators
Clean rooms
Surface micromachining
Electric properties
Mechanical properties
Networks (circuits)

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Al Khusheiny, M., & Yeop Majlis, B. (2006). Aluminum based two-port-clamped-clamped resonators. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 188-192). [4266595] https://doi.org/10.1109/SMELEC.2006.381045

Aluminum based two-port-clamped-clamped resonators. / Al Khusheiny, Mustafa; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 188-192 4266595.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Al Khusheiny, M & Yeop Majlis, B 2006, Aluminum based two-port-clamped-clamped resonators. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266595, pp. 188-192, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381045
Al Khusheiny M, Yeop Majlis B. Aluminum based two-port-clamped-clamped resonators. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 188-192. 4266595 https://doi.org/10.1109/SMELEC.2006.381045
Al Khusheiny, Mustafa ; Yeop Majlis, Burhanuddin. / Aluminum based two-port-clamped-clamped resonators. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 188-192
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