AFM search for slow MCI-produced nanodefects on atomically clean monocrystalline insulator surfaces

I. C. Gebeshuber, S. Cernusca, F. Aumayr, H. P. Winter

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

We have investigated by means of atomic force microscopy (AFM) single impacts of slow singly and multiply charged Ar ions on atomically clean insulator surfaces for LiF(100), SiO2(0001) α-quartz, muscovite mica and sapphire c-plane Al2O3(0001) crystals. The target samples have been continuously kept under UHV conditions by transferring them in a transportable UHV vault from the vacuum chamber for ion bombardment to the AFM instrument. Slow ion bombardment was accompanied by low-energy electron flooding to compensate for possible target surface charge-up. For Al2O3 clear ion-charge dependent surface defects in lateral and vertical directions give evidence for potential sputtering, which until now has only been demonstrated with thin polycrystalline insulator films.

Original languageEnglish
Pages (from-to)751-757
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume205
DOIs
Publication statusPublished - May 2003
Externally publishedYes

Fingerprint

Ion bombardment
Atomic force microscopy
insulators
atomic force microscopy
Ions
Quartz
Aluminum Oxide
bombardment
Surface defects
Mica
Surface charge
Heavy ions
Sapphire
Sputtering
ions
ion charge
muscovite
Vacuum
surface defects
vacuum chambers

Keywords

  • HCI
  • In situ AFM
  • Insulators
  • Monocrystalline insulator surfaces
  • Nanodefects
  • Potential sputtering

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

AFM search for slow MCI-produced nanodefects on atomically clean monocrystalline insulator surfaces. / Gebeshuber, I. C.; Cernusca, S.; Aumayr, F.; Winter, H. P.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 205, 05.2003, p. 751-757.

Research output: Contribution to journalArticle

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