A simulation study of piezoresistive sensing resistor in MEMS square diaphragm

Anees Abdul Aziz, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A piezoresistive sensing resistor in MEMS square diaphragm has been studied using the MEMCAD 4.0 suite of tools, and in particular the piezoresistive module. It is seen that the effect of resistor size and position significantly effects the performance and behavior of the sensor. A 0.55 MPa pressure is used for the simulation on a 500um to 200um wide square shape diaphragm with 50um in thickness. Each resistor is built in arranged into a full Wheatstone Bridge configuration. To determine the optimal resistor, effective resistor length on sensor output is simulated. The best resistor length is about 20% of the diaphragm length, by increasing or decreasing the resistor length from the effective resistor length, it will greatly reduce the voltage output and the sensitivity of the sensor. The temperature effect on piezoresistive were also evaluated over a temperatures range of -19 °C to 85 °C. The normalized resistance change with the temperature was linear but the voltage output and the sensitivity decrease with increasing temperature.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
Pages681-685
Number of pages5
Volume1136
DOIs
Publication statusPublished - 2009
EventInternational Conference on Nanoscience and Nanotechnology, Nano-SciTech 2008 - Selangor
Duration: 18 Nov 200821 Nov 2008

Other

OtherInternational Conference on Nanoscience and Nanotechnology, Nano-SciTech 2008
CitySelangor
Period18/11/0821/11/08

Fingerprint

diaphragms
resistors
microelectromechanical systems
simulation
output
sensors
Wheatstone bridges
sensitivity
electric potential
temperature
temperature effects
modules
configurations

Keywords

  • MEMS square diaphragm
  • Piezoresistive sensing resistor
  • Wheatstone bridge configuration

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

A simulation study of piezoresistive sensing resistor in MEMS square diaphragm. / Aziz, Anees Abdul; Yeop Majlis, Burhanuddin.

AIP Conference Proceedings. Vol. 1136 2009. p. 681-685.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aziz, AA & Yeop Majlis, B 2009, A simulation study of piezoresistive sensing resistor in MEMS square diaphragm. in AIP Conference Proceedings. vol. 1136, pp. 681-685, International Conference on Nanoscience and Nanotechnology, Nano-SciTech 2008, Selangor, 18/11/08. https://doi.org/10.1063/1.3160233
Aziz, Anees Abdul ; Yeop Majlis, Burhanuddin. / A simulation study of piezoresistive sensing resistor in MEMS square diaphragm. AIP Conference Proceedings. Vol. 1136 2009. pp. 681-685
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