A simulation studies of piezoresistive sensing resistor in MEMS square diaphragm

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A piezoresistive sensing resistor in MEMS square diaphragm has been studied using the MEMCAD 4.0 suite of tools, and in particular the piezoresistive module. It is seen that the effect of resistor size and position significantly effects the performance and behavior of the sensor. A 0.55 MPa pressure is used for the simulation on a 500um to 200um wide square shape diaphragm with 50um in thickness. Each resistor is built in arranged into a full Wheatstone Bridge configuration. To determine the optimal resistor, effective resistor length on sensor output is simulated. The best resistor length is about 20% of the diaphragm length, by increasing or decreasing the resistor length from the effective resistor length, it will greatly reduce the voltage output and the sensitivity of the sensor. The temperature effect on piezoresistive were also evaluated over a temperatures range of -19 °C to 85 °C. The normalized resistance change with the temperature was linear but the voltage output and the sensitivity decrease with increasing temperature.

Original languageEnglish
Title of host publication2010 2nd International Conference on Computer Engineering and Applications, ICCEA 2010
Pages576-579
Number of pages4
Volume2
DOIs
Publication statusPublished - 2010
Event2nd International Conference on Computer Engineering and Applications, ICCEA 2010 -
Duration: 19 Mar 201021 Mar 2010

Other

Other2nd International Conference on Computer Engineering and Applications, ICCEA 2010
Period19/3/1021/3/10

Fingerprint

Diaphragms
Resistors
MEMS
Sensors
Electric potential
Thermal effects
Temperature

Keywords

  • MEMS square diaphragm
  • Piezoresistive

ASJC Scopus subject areas

  • Computer Science Applications
  • Software

Cite this

Aziz, A. A., & Yeop Majlis, B. (2010). A simulation studies of piezoresistive sensing resistor in MEMS square diaphragm. In 2010 2nd International Conference on Computer Engineering and Applications, ICCEA 2010 (Vol. 2, pp. 576-579). [5445713] https://doi.org/10.1109/ICCEA.2010.261

A simulation studies of piezoresistive sensing resistor in MEMS square diaphragm. / Aziz, A. A.; Yeop Majlis, Burhanuddin.

2010 2nd International Conference on Computer Engineering and Applications, ICCEA 2010. Vol. 2 2010. p. 576-579 5445713.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aziz, AA & Yeop Majlis, B 2010, A simulation studies of piezoresistive sensing resistor in MEMS square diaphragm. in 2010 2nd International Conference on Computer Engineering and Applications, ICCEA 2010. vol. 2, 5445713, pp. 576-579, 2nd International Conference on Computer Engineering and Applications, ICCEA 2010, 19/3/10. https://doi.org/10.1109/ICCEA.2010.261
Aziz AA, Yeop Majlis B. A simulation studies of piezoresistive sensing resistor in MEMS square diaphragm. In 2010 2nd International Conference on Computer Engineering and Applications, ICCEA 2010. Vol. 2. 2010. p. 576-579. 5445713 https://doi.org/10.1109/ICCEA.2010.261
Aziz, A. A. ; Yeop Majlis, Burhanuddin. / A simulation studies of piezoresistive sensing resistor in MEMS square diaphragm. 2010 2nd International Conference on Computer Engineering and Applications, ICCEA 2010. Vol. 2 2010. pp. 576-579
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