A COMSOL model to analyse the structural mechanical problem in an electrostatically controlled prestressed micro-mirror

Hazian Mamat, Azrul Azlan Hamzah, A. P. Azman, Nurfirdaus A. Rahim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In nowadays biomedical and industrial applications such as optical switch matrices, laser scanning displays and biomedical imaging systems which are parts of theactuation and sensing components are realized using micro-mirrors fabricated usingMicro Electro Mechanical Systems (MEMS) technology. This paper studies through comsol model, the structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam [5]. There are few base materials were introduced such as Alumina, Aluminium 3003 H18, Aluminium 6063 T18, Copper and Aluminium. To make the leg or cantilevermore efficient the structural steel was introduced together with base materials listed above to further reduce the lift-off stress.

Original languageEnglish
Pages (from-to)950-956
Number of pages7
JournalWorld Applied Sciences Journal
Volume26
Issue number7
DOIs
Publication statusPublished - 2013

Fingerprint

Mirrors
Aluminum
Optical switches
Cantilever beams
Imaging systems
Industrial applications
Alumina
Display devices
Scanning
Copper
Mechanical properties
Steel
Lasers

Keywords

  • COMSOL
  • Electrostatic driven
  • Micro-mirror

ASJC Scopus subject areas

  • General

Cite this

A COMSOL model to analyse the structural mechanical problem in an electrostatically controlled prestressed micro-mirror. / Mamat, Hazian; Hamzah, Azrul Azlan; Azman, A. P.; Rahim, Nurfirdaus A.

In: World Applied Sciences Journal, Vol. 26, No. 7, 2013, p. 950-956.

Research output: Contribution to journalArticle

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