A comparative study on ZnS thin films grown by thermal evaporation and magnetron sputtering

F. Haque, K. S. Rahman, M. A. Islam, P. Chelvanathan, T. H. Chowdhury, M. M. Alam, Nowshad Amin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Thin films of ZnS were deposited on cleaned soda lime glass substrates by using thermal evaporation and RF magnetron sputtering techniques. For thermal evaporation, a boat-substrate distance of 4cm was maintained. In case of sputtering, the deposition was done at a substrate temperature of 400°C. A comparative study of the structural and optical properties of the thin films prepared from both the processes was carried out by means of XRD, AFM and UV-Vis spectrometry. From the XRD analysis, it is found that the films grown from both the processes are polycystalline in nature having the (111) preferential orientation. The variations of crystallite grain size, lattice constant, microstrain and dislocation densities are also observed for the films. The AFM results show that, the average roughness of the sputtered films are slightly lower than the thermally evaporated films. From the optical study, the bandgaps were found as 3.25eV and 3.8eV for the films deposited by thermal evaporation and sputtering techniques respectively.

Original languageEnglish
Title of host publicationProceeding - 2013 IEEE Student Conference on Research and Development, SCOReD 2013
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages260-264
Number of pages5
ISBN (Print)9781479926565
DOIs
Publication statusPublished - 6 Jan 2015
Event2013 11th IEEE Student Conference on Research and Development, SCOReD 2013 - Putrajaya
Duration: 16 Dec 201317 Dec 2013

Other

Other2013 11th IEEE Student Conference on Research and Development, SCOReD 2013
CityPutrajaya
Period16/12/1317/12/13

Fingerprint

Thermal evaporation
Magnetron sputtering
Thin films
Sputtering
Substrates
Boats
Lime
Spectrometry
Lattice constants
Structural properties
Energy gap
Optical properties
Surface roughness
Glass
Temperature

Keywords

  • bandgap
  • sputtering
  • thermal evaporation
  • ZnS

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Biomedical Engineering
  • Electrical and Electronic Engineering

Cite this

Haque, F., Rahman, K. S., Islam, M. A., Chelvanathan, P., Chowdhury, T. H., Alam, M. M., & Amin, N. (2015). A comparative study on ZnS thin films grown by thermal evaporation and magnetron sputtering. In Proceeding - 2013 IEEE Student Conference on Research and Development, SCOReD 2013 (pp. 260-264). [7002584] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SCOReD.2013.7002584

A comparative study on ZnS thin films grown by thermal evaporation and magnetron sputtering. / Haque, F.; Rahman, K. S.; Islam, M. A.; Chelvanathan, P.; Chowdhury, T. H.; Alam, M. M.; Amin, Nowshad.

Proceeding - 2013 IEEE Student Conference on Research and Development, SCOReD 2013. Institute of Electrical and Electronics Engineers Inc., 2015. p. 260-264 7002584.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haque, F, Rahman, KS, Islam, MA, Chelvanathan, P, Chowdhury, TH, Alam, MM & Amin, N 2015, A comparative study on ZnS thin films grown by thermal evaporation and magnetron sputtering. in Proceeding - 2013 IEEE Student Conference on Research and Development, SCOReD 2013., 7002584, Institute of Electrical and Electronics Engineers Inc., pp. 260-264, 2013 11th IEEE Student Conference on Research and Development, SCOReD 2013, Putrajaya, 16/12/13. https://doi.org/10.1109/SCOReD.2013.7002584
Haque F, Rahman KS, Islam MA, Chelvanathan P, Chowdhury TH, Alam MM et al. A comparative study on ZnS thin films grown by thermal evaporation and magnetron sputtering. In Proceeding - 2013 IEEE Student Conference on Research and Development, SCOReD 2013. Institute of Electrical and Electronics Engineers Inc. 2015. p. 260-264. 7002584 https://doi.org/10.1109/SCOReD.2013.7002584
Haque, F. ; Rahman, K. S. ; Islam, M. A. ; Chelvanathan, P. ; Chowdhury, T. H. ; Alam, M. M. ; Amin, Nowshad. / A comparative study on ZnS thin films grown by thermal evaporation and magnetron sputtering. Proceeding - 2013 IEEE Student Conference on Research and Development, SCOReD 2013. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 260-264
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